Products that help optimize top-level semiconductor processes and nanofabrication

RnD-100-award

aBeam Technologies offers a variety of products to improve semiconductor manufacturing and nanofabrication. Our
software aids in the simulation and optimization of nanolithography, mask-making, metrology and defect inspection,
as well as in the design and optimization of semiconductor equipment.

Photomasks Fabrication

Our software simulates and optimizes electron beam lithography, including charging placement error, resist heating, as well as resist exposure and development. more

Electron Beam Lithography

Our products include simulation tools to understand and optimize electron interactions with materials, electron scattering, charging, heating, energy deposition, etc. more

Metrology

The simulation of optical scatterometry from the first principles of physics is performed by the SCATT software. This software helps understand the sensitivity of signals to process variations, as well as the applicability of the system to specific layers and measurements. more

Test Chips and Fiber Photonics

The company manufactures custom test chips and has a variety of off-the-shelf test chips. The chip sizes are from 5 mm to 300 mm wafers. Photonic elements imprinted on the top of a fiber provide easy-to-use solution for wavefront manipulation. more